Deposition of functional thin films by plasma processes – Bc. Petr SEZEMSKÝ
Bc. Petr SEZEMSKÝ
Master's thesis
Deposition of functional thin films by plasma processes
Abstract:
An aim of this work is a research of a deposition process of indium tin oxide by plasma assisted methods. The thesis deals with plasma diagnostics, e.g. Langmuir probe diagnostics and optical emission spectroscopy, as well as describes experiments of film deposition including their diagnostics, e.g. absorption spectroscopy, X-ray diffractometry and atomic force microscopy.
Language used: English
Date on which the thesis was submitted / produced: 14. 12. 2016
Thesis defence
- Supervisor: doc. RNDr. Vítězslav Straňák, Ph.D.
Citation record
ISO 690-compliant citation record:
SEZEMSKÝ, Petr. \textit{Deposition of functional thin films by plasma processes}. Online. Master's thesis. České Budějovice: University of South Bohemia in České Budějovice, Faculty of Science. 2016. Available from: https://theses.cz/id/w7x9n3/.
The right form of listing the thesis as a source quoted
SEZEMSKÝ, Petr. Deposition of functional thin films by plasma processes. Č. Budějovice, 2016. diplomová práce (Mgr.). JIHOČESKÁ UNIVERZITA V ČESKÝCH BUDĚJOVICÍCH. Přírodovědecká fakulta
Full text of thesis
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Institution archiving the thesis and making it accessible: JIHOČESKÁ UNIVERZITA V ČESKÝCH BUDĚJOVICÍCH, Přírodovědecká fakultaUNIVERSITY OF SOUTH BOHEMIA IN ČESKÉ BUDĚJOVICE
Faculty of ScienceMaster programme / field:
Physics / Physical Measurements and Modelling
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