Zpět na vyhledávání

Mgr. Miloš Hronček

Bachelor's thesis

Určování pnutí v tenkých vrstvách

Strain analysis in thin layers
Abstract:
The content of this work is description of experiments that led to the identification of stress in thin CN_X films deposited on Si substrate with (001) orientation. The theoretical part deals with the general analysis of stress and deformation of the continuum and the relationship between them. The explanation of the Stoney’s equation is then based on this analysis. Experimental section describes the …more
Abstract:
Obsahom tejto práce je opis experimentov, ktoré viedli k určeniu napätia v tenkých CN_X vrstvách deponovaných na Si substráte s orientáciou (001). Teoretická časť sa zaoberá všeobecným rozborom napätia a deformácie kontinua a vzťahu medzi nimi. Na základe tohto rozboru je potom vysvetlený Stoneyho vzťah. Experimentálna časť opisuje meranie krivosti pomocou RTG difrakcie.
 

Keywords

tenká vrstva RTG difrakcia krivosť tenzor napatia napätie thin layer X-ray diffraction curvature stress tensor stress
 
Language used: Slovak
Date on which the thesis was submitted / produced: 20. 5. 2011
Identifier: https://is.muni.cz/th/omf9o/

Thesis defence

  • Date of defence: 21. 6. 2012
  • Supervisor: Mgr. Ondřej Caha, Ph.D.

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Institution archiving the thesis and making it accessible: Masarykova univerzita, Přírodovědecká fakulta
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Masaryk University

Faculty of Science

Bachelor programme / field:
Physics / Physics

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