Mgr. Miloš Hronček
Bachelor's thesis
Určování pnutí v tenkých vrstvách
Strain analysis in thin layers
Abstract:
The content of this work is description of experiments that led to the identification of stress in thin CN_X films deposited on Si substrate with (001) orientation. The theoretical part deals with the general analysis of stress and deformation of the continuum and the relationship between them. The explanation of the Stoney’s equation is then based on this analysis. Experimental section describes the …moreAbstract:
Obsahom tejto práce je opis experimentov, ktoré viedli k určeniu napätia v tenkých CN_X vrstvách deponovaných na Si substráte s orientáciou (001). Teoretická časť sa zaoberá všeobecným rozborom napätia a deformácie kontinua a vzťahu medzi nimi. Na základe tohto rozboru je potom vysvetlený Stoneyho vzťah. Experimentálna časť opisuje meranie krivosti pomocou RTG difrakcie.
Language used: Slovak
Date on which the thesis was submitted / produced: 20. 5. 2011
Identifier:
https://is.muni.cz/th/omf9o/
Thesis defence
- Date of defence: 21. 6. 2012
- Supervisor: Mgr. Ondřej Caha, Ph.D.
Full text of thesis
Contents of on-line thesis archive
Published in Theses:- světu
Other ways of accessing the text
Institution archiving the thesis and making it accessible: Masarykova univerzita, Přírodovědecká fakultaMasaryk University
Faculty of ScienceBachelor programme / field:
Physics / Physics