Příprava tenkých vrstev ze systému Ga-S metodou spin coating a jejich charakterizace mikroskopií atomárních sil

Ing. Tomáš Světlík

Master's thesis

Preparation of thin films of Ga-S systems by spin coating method and characterization by means of atomic force microscopy

Abstract:

Diplomová práce je zaměřena na fyzikální a chemické depozice tenkých vrstev. Jsou popsány organokovové sloučeniny a organokovové chalkogenidy jako možné single source prekurzory. V experimentální části byly připraveny intramolekulárně koordinované sloučeniny organogallitých chalkogenidů a jejich roztoky byly deponovány spin coatingem. Vzniklé tenké vrstvy byly popsány a charakterizovány.

Abstract:

This thesis is focused on the physical and chemical way of deposition of thin films. Organometallic compounds and organometallic chalcogenides as possible single source precursors are described. In the experimental part the intramolecularly coordinated compounds of organogallium chalcogenides were prepared. Their solutions were deposited by spin coating and than those thin films were described and characterized.

Keywords

organokovy, chalkogenidy, III-VI materiály, single source prekurzor, spin coating, tenké vrstvy

Language used: Czech

Date on which the thesis was submitted / produced: 7. 5. 2015

Thesis defence

• Date of defence: 3. 6. 2015
• Supervisor: Ing. Marek Bouška, Ph.D.

University of Pardubice

Faculty of Chemical Technology

Master programme / field:
Graphic Arts and Printing Technology / Graphic Arts and Printing Technology