Plazmochemická depozice organosilikonových tenkých vrstev – Bc. Igor Sabol
Bc. Igor Sabol
Bachelor's thesis
Plazmochemická depozice organosilikonových tenkých vrstev
Plasma enhanced chemical vapor deposition of organosilicon thin films
Abstract:
In this bachelor thesis I deal with the deposition of polymer layers using a capacitivelycoupled high-frequency low-pressure discharge. Hexamethyldisiloxane and oxygen were used as precursors, and the layers were deposited on a glass plates and silicon substrate. During deposition, the deposition conditions were changed, especially pressure, bias and deposition time. Surface properties were analyzed …moreAbstract:
V tejto bakalárskej práci sa venujem depozícii polymérnych vrstiev pomocou vysokofrekvencného nízkotlakového tlecieho výboja s kapacitnou väzbou. Ako prekurzory sú použité hexametyldisiloxan a kyslík, vrstvy boli deponované na sklo a kremíkový substrát. Pri depozíciách boli menené depozicné podmienky, a to tlak, predpätie a depozicný cas. Povrchové vlastnosti boli analyzované pomocou konfokálneho mikroskopu …more
Language used: Slovak
Date on which the thesis was submitted / produced: 24. 5. 2022
Identifier:
https://is.muni.cz/th/zulwt/
Thesis defence
- Date of defence: 27. 6. 2022
- Supervisor: Mgr. Roman Přibyl
- Reader: Mgr. Ondřej Jašek, Ph.D.
Citation record
Full text of thesis
Contents of on-line thesis archive
Published in Theses:- světu
Other ways of accessing the text
Institution archiving the thesis and making it accessible: Masarykova univerzita, Přírodovědecká fakultaMasaryk University
Faculty of ScienceBachelor programme / field:
Applied Physics / Nanotechnology - Applied Physics
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