Bc. Igor Sabol

Bachelor's thesis

Plazmochemická depozice organosilikonových tenkých vrstev

Plasma enhanced chemical vapor deposition of organosilicon thin films
Abstract:
In this bachelor thesis I deal with the deposition of polymer layers using a capacitivelycoupled high-frequency low-pressure discharge. Hexamethyldisiloxane and oxygen were used as precursors, and the layers were deposited on a glass plates and silicon substrate. During deposition, the deposition conditions were changed, especially pressure, bias and deposition time. Surface properties were analyzed …more
Abstract:
V tejto bakalárskej práci sa venujem depozícii polymérnych vrstiev pomocou vysokofrekvencného nízkotlakového tlecieho výboja s kapacitnou väzbou. Ako prekurzory sú použité hexametyldisiloxan a kyslík, vrstvy boli deponované na sklo a kremíkový substrát. Pri depozíciách boli menené depozicné podmienky, a to tlak, predpätie a depozicný cas. Povrchové vlastnosti boli analyzované pomocou konfokálneho mikroskopu …more
 

Keywords

PECVD tenké vrstvy prachová plazma plazmové polyméry vplyv predpätia thin films dusty plasma plasma polymers bias influence
 
Language used: Slovak
Date on which the thesis was submitted / produced: 24. 5. 2022
Identifier: https://is.muni.cz/th/zulwt/

Thesis defence

  • Date of defence: 27. 6. 2022
  • Supervisor: Mgr. Roman Přibyl
  • Reader: Mgr. Ondřej Jašek, Ph.D.

Citation record

Cite this text

Full text of thesis

Contents of on-line thesis archive
Published in Theses:
  • světu
Other ways of accessing the text
Institution archiving the thesis and making it accessible: Masarykova univerzita, Přírodovědecká fakulta
Složka Reference to the local database directory of the institution